T1. Lithography Tutorial

2026-02-11 | 오전 9:00 - 오후 12:00
#307

This tutorial is intended for who interested in lithography technologies and related area. In this tutorial, trends, and issues as well as fundamentals of Lithography technologies will be provided from industry experts and academia. 

 

  • Date: Feb 11(Wed), 2026
  • Time: 09:00-12:00
  • Room: 307, Conference Room (South), 3F, COEX
  • Language: Korean (Simultaneous interpretation will NOT be provided.)
  • Registration Fee (KRW)
    • Early Bird: SEMI Members 132,000 / Non-members 176,000 / Student 66,000
    • Onsite: 220,000

Agenda

Lithography Process Technology

Jung Sik Kim

SK hynix
오전 9:00 - 오전 9:50
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Q&A / Break

오전 9:50 - 오전 10:00
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Development Status and Future Prospects of Lithography Equipment

Hyoung-Kook Kim

ASML
오전 10:00 - 오전 10:50
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Q&A / Break

오전 10:50 - 오전 11:00
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Fundamentals of EUV Lithography

Prof. Jinho Ahn

Hanyang University
오전 11:00 - 오전 11:50
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Q&A

오전 11:50 - 오후 12:00
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*The agenda is subject to change.