T1. Lithography Tutorial

Wednesday, February 11 | 9:00 am - 12:00 pm
#307

This tutorial is intended for who interested in lithography technologies and related area. In this tutorial, trends, and issues as well as fundamentals of Lithography technologies will be provided from industry experts and academia. 

 

  • Date: Feb 11(Wed), 2026
  • Time: 09:00-12:00
  • Room: 307, Conference Room (South), 3F, COEX
  • Language: Korean (Simultaneous interpretation will NOT be provided.)
  • Registration Fee
    • Early Bird: SEMI Members 132,000 KRW / Non-members 176,000 KRW / Student 66,000 KRW
    • Onsite: 220,000 KRW

Agenda

Lithography Process Technology

Jung Sik Kim

SK hynix
9:00 am - 9:50 am
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Q&A / Break

9:50 am - 10:00 am
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Development Status and Future Prospects of Lithography Equipment

Hyoung-Kook Kim

ASML
10:00 am - 10:50 am
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Q&A / Break

10:50 am - 11:00 am
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Fundamentals of EUV Lithography

Prof. Jinho Ahn

Hanyang University
11:00 am - 11:50 am
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Q&A

11:50 am - 12:00 pm
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*The agenda is subject to change.