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T4. Plasma & Etching Tutorial

Thursday, February 12 | 9:00 am - 12:00 pm
#307

This tutorial is designed as basic course for new engineers who are working at etching technology related area. With the practical lecture from device makers and equipment suppliers, you will learn the hottest issues and challenges in plasma & etching process and fundamental technologies as well.  

 

  • Date: Feb 12(Thu), 2026
  • Time: 9:00-12:00
  • Room: 307, Conference Room (South), 3F, COEX
  • Language: Korean
  • Simultaneous interpretation will NOT be provided.
  • Registration Fee
    • Early Bird: SEMI Members 132,000 KRW / Non-members 176,000 KRW / Student 66,000 KRW
    • Onsite: 220,000 KRW

Agenda

Fundamentals of Plasma Etching

Prof. Geun Young Yeom

Sungkyunkwan University
9:00 am - 10:15 am

Etch Challenges and Technology Trends

Huichan Seo

SK hynix
10:30 am - 11:45 am

* The agenda is subject to change.