주요 콘텐츠로 건너뛰기

T4. Plasma & Etching Tutorial

2026-02-12 | 오전 9:00 - 오후 12:00
#307

This tutorial is designed as basic course for new engineers who are working at etching technology related area. With the practical lecture from device makers and equipment suppliers, you will learn the hottest issues and challenges in plasma & etching process and fundamental technologies as well.  

 

  • Date: Feb 12(Thu), 2026
  • Time: 9:00-12:00
  • Room: 307, Conference Room (South), 3F, COEX
  • Language: Korean (Simultaneous interpretation will NOT be provided.)
  • Registration Fee (KRW)
    • Early Bird: SEMI Members 132,000 / Non-members 176,000 / Student 66,000
    • Onsite: 220,000

Agenda

Fundamentals of Plasma Etching

Prof. Geun Young Yeom

Sungkyunkwan University
오전 9:00 - 오전 10:15

Etch Challenges and Technology Trends

Huichan Seo

SK hynix
오전 10:30 - 오전 11:45

*The agenda is subject to change.