Prof. Won-Jun Lee

Prof. Won-Jun Lee has been a professor in the Department of Nanotechnology and Advanced Materials Engineering at Sejong University since 2001. His research interests include processes, materials, and equipment for semiconductor device fabrication. Currently, he is focusing on the novel chemistry and reaction mechanisms of atomic layer deposition (ALD) and etching (ALE) processes for next-generation devices, utilizing in situcharacterization and density functional theory (DFT) calculations. 

Before joining Sejong University, Prof. Lee was a Member of Technical Staff at LG Semicon and Hyundai Electronics (now SK Hynix) for 5 years, during which he developed copper and aluminum interconnect technologies. He was a Visiting Scholar at Stanford University from 1996 to 1997 and a Visiting Scientist at Grenoble INP in 2015. Prof. Lee also served as Vice Director of the Consortium of Semiconductor Advanced Research (COSAR) from 2007 to 2012 and as Program Director of the Korean Research Foundation from 2014 to 2015. 

Prof. Lee received his BS, MS, and Ph.D. degrees in materials science and engineering from the Korea Advanced Institute of Science and Technology (KAIST) in 1991, 1993, and 1996, respectively. His dissertations focused on the chemical vapor deposition (CVD) of silicon carbide and copper.