T5. CMP & Cleaning Tutorial

Thursday, February 12 | 2:00 pm - 5:00 pm
#308

This tutorial aims to provide a basic course for new engineers who are working at CMP & Cleaning technology related area. We expect you will learn the fundamental technologies in CMP & Cleaning process from academia. 

 

  • Date: Feb 12(Thu), 2026
  • Time: 14:00-17:00
  • Room: 308, Conference Room (South), 3F, COEX
  • Language: Korean
  • Simultaneous interpretation will NOT be provided.
  • Registration Fee
    • Early Bird: SEMI Members 132,000 KRW / Non-members 176,000 KRW / Student 66,000 KRW
    • Onsite: 220,000 KRW

Agenda

CMP Fundamentals for 3D Integration

Prof. Taesung Kim

Sungkyunkwan University
2:00 pm - 3:15 pm
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Q&A / Break

3:15 pm - 3:30 pm
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Understanding of Particle Removal and Surface Preparation for 3D Integration Era

Prof. Tae-Gon Kim

Hanyang University
3:30 pm - 4:45 pm
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Q&A

4:45 pm - 5:00 pm
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* The agenda is subject to change.