Siva Kanakasabapathy

Siva Kanakasabapathy is Technical Director in the ALD/CVD Metals Business Unit at Lam research. In charge for advanced Logic metallization, Siva currently drives customer solutions and products that deliver RC scaling & productivity at the 1.4NM node and beyond. 

Siva brings to his position a well-established background of 23 years in semiconductor process integration, etch and deposition process development cultivated in his 16 years at IBM Research. He holds over 130 US patents in diverse domains surrounding microelectronics design and manufacturing.

Siva earned his Ph.D. in 2001 in Electrical engineer from the University of Texas at Dallas where his doctoral work focused on ion-ion plasma generation and diagnostics for damage free semiconductor processing.