Yu Cao

Yu Cao is Senior Vice President at ASML, and CEO of HMI, an ASML company. 

Dr. Cao started his career as an algorithm engineer at KLA-Tencor from 1996 to 2000, where his contributions to the 300 and 500 series reticle inspection systems were recognized with three consecutive promotions. He joined Onetta in 2000, a venture-backed optical communications company, as software development manager.  Dr. Cao co-founded Brion in 2002, and architected the development of lithography modeling and simulation algorithms, a key enabler of Brion products. After the acquisition of Brion by ASML in 2007, Dr. Cao led the development of new product applications of computational lithography in the fab space. In 2011, he left ASML to co-found Founton Technologies, a company in the area of digital advertising, which was acquired by Alibaba in 2014. He then led the Silicon Valley team of Alibaba’s Institute of Data Science and Technologies. Dr. Cao returned to ASML in 2015 and took the position of Brion General Manager, before taking the role of HMI CEO in the beginning of 2020.

Yu Cao received his M.S. and Ph.D. in Physics from the California Institute of Technology, Pasadena, California, USA, and a bachelor's degree from the University of Science and Technology of China, Hefei, Anhui, China. He holds over 40 US patents.