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Mark J. Kushner received the BS and BA from the University of California at Los Angeles; and the MS and Ph.D. in Applied Physics from the California Institute of Technology. He served on the technical staffs of Sandia National Laboratory, Lawrence Livermore National Laboratory and Spectra Technology before joining the University of Illinois at Urbana-Champaign in 1986 where he was the Founder Professor of Engineering in the Department of Electrical and Computer Engineering and served in many administrative roles. In January 2005, Dr. Kushner became Dean of Engineering and the Melsa Professor at Iowa State University. Prof. Kushner then joined the University of Michigan as director of the Michigan Institute for Plasma Science and Engineering and the Haddad Collegiate Professor in September 2008. Prof. Kushner's research area is low temperature plasmas, their fundamental properties and technological applications. He has served on the editorial boards of several journals, is former editor-in-chief of Plasma Sources Science and Technology and is a co-author of the National Research Council 2010 Decadal Report on Plasma Science and the DOE Low Temperature Workshop Report. Prof. Kushner is a member of the US National Academy of Engineering.

 

본 연사의 발표는 S4. Plasma Science and Etching Technology(STS) 에서 볼 수 있습니다.

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