Dan Rodier is Technology Development Manager at Particle Measuring Systems. He has a Ph.D. in analytical chemistry from the University of Colorado and has over 25 years of experience developing and implementing technologies and strategies to measure airborne molecular species and particulate contamination. Dr. Rodier has five patents for microcontamination monitoring and control technologies. He has worked with customers across Asia, Europe, and North America to implement monitoring programs in the semiconductor/electronics industries and has contributed to Yield Enhancement working groups of the International Technology Roadmap for Semiconductors (ITRS) and continues to be involved with the International Roadmap for Devices and Systems (IRDS) chemicals group.
본 연사의 발표는 S5. Contamination-free Manufacturing and CMP Technology(STS) 에서 볼 수 있습니다.