Dr. Timothy A. Brunner, Ph.D. has been technology and development Fellow at GLOBALFOUNDRIES since 2015, working in the area of lithographic patterning for the production of integrated circuits. Prior to joining GLOBALFOUNDRIES, Brunner was a Research Staff Member at IBM Corp. for 28 years, with technical interests in advanced image formation, simulation, process control, metrology techniques and interdisciplinary aspects of lithography. Dr. Brunner has published extensively, and holds several dozen issued patents in the area of optical lithography. He served as the executive chair of the 1997 and 1998 SPIE Microlithography Symposia. He was named an SPIE Fellow in 2003 and won the Frits Zernike award in 2006.
Brunner received a Ph.D. degree in physics from MIT, Cambridge, MA, USA and a B.A. degree in physics from Carleton College, Northfield, MN, USA While in school, he studied pipe organ and played volleyball and tennis.
본 연사의 발표는 S1. Advanced Lithography(STS) 에서 볼 수 있습니다.