Sunghoon Lee, Ph.D. has been a Senior Member of Technical Staff at Globalfoundries USA since 2016 with responsibility of 7nm CMP technology development. He has been in charge of next generation consumable tests and joint developments for advanced material at the Advanced Technology Development.
Prior to joining Globalfoundries, Dr. Lee was a Staff engineer of Portland Technology Development at INTEL for 10years. He has been responsible of BEOL CMP technology development in 14/22/32/45nm node and through silicon via (TSV) technology development.
Dr. Lee received a Ph.D. degree in CMP research under advisory of past professor David Dornfeld from University of California, Berkeley, CA, USA in 2006. Also, he earned a master degree in professor Haedo Jeong’s lab from Pusan National University in 1999.
본 연사의 발표는 S5. Contamination-free Manufacturing and CMP Technology(STS) 에서 볼 수 있습니다.