Winfried Kaiser studied Physics and Technical Optics at the Universities of Tübingen and Stuttgart and received his Diploma in 1982. He joined ZEISS in 1982 as a scientist and has held several management positions since. At the moment, he is Senior Vice President “Product Strategy” of Carl Zeiss SMT GmbH. In 1995 he initiated the cooperation on EUV in Europe. Winfried Kaiser is a recipient of the 2006 European SEMI Award and has been promoted to “Carl Zeiss Fellow” in 2007. In 2008, he was named “Fellow of the SPIE Society” and introduced into the Chip Making Industry Hall of Fame. He received the SEMI “Bob Graham” SME Excellence Award in 2014.
본 연사의 발표는 S1. Advanced Lithography(STS) 에서 볼 수 있습니다.