02-531-7800

Korean


Metrology and Inspection 포럼

Room 402, COEX Thursday, January 24
10:00am to 7:00pm

New Waves: Ready to Enjoy?
 
The new waves of industry 4.0 is coming and the role of metrology and inspection is getting more and more important to enable it. To enjoy these waves, we need to prepare the new technologies and sources accordingly in a timely manner. With excellent 10 presentations from technology experts, you can get better understanding on MI challenges and solutions we’re facing now and near future and build the strong network with industry leaders.
 
  • 날짜: 2019년 1월 24일(목)
  • 시간: 10:00-19:00
  • 장소: 코엑스 4층 402호
  • 언어: 영어, 한국어 (동시통역은 지원되지 않습니다.)
 

Committee

  • Chuck Kim (AMETEK Korea)
  • Chang Woo Kim (KLA Corporation)
  • TK Kim (Semilab Korea)
  • Harris Kim (Rudolph Technologies Korea)
  • Munhong Ro (DB HiTek)
  • Changman Moon (NOVA Measuring Instruments Korea)
  • Byong Chon Park (KRISS)
  • Hyungwon Yoo (Hitachi High-Technologies Korea)
  • Byoung-Ho Lee (SK hynix)
  • Suk Woo Martin Lee (Applied Materials Korea)   
  • Sung Hun Lee (Thermo Fisher Scientific Electron Microscopy Korea)
  • Dongchul Ihm (Samsung Electronics)
  • Hyunjin Chang (Auros Technology)
  • Jason Jeong (Nextin)
  • Jaesung Choi (ASML Korea)

 

등록비

  SEMI 회원사 비회원사 학생
사전등록(1/16까지) 200,000 원 240,000 원 120,000 원
현장등록 240,000 원 280,000 원 150,000 원

 

아젠다

 
 
10:00-10:10
Welcome
 
 
10:10-10:40
Keynote
 
 
 
 
 
 
Session 1: Industry 4.0
 
 
10:40-11:10
A Systematic Approach to Integrate Metrology and Inspection
 
 
 
11:10-11:40
Industry Overview of Fast and Intelligent Metrology by S/TEM (CD-TEM)
 
 
 
11:40-12:10
 
 
 
12:10-14:00
Lunch
 
 
14:00-14:30
 
 
 
14:30-15:00
 
 
 
15:00-15:20
Break
 
 
 
 
Session 2: New Sources
 
 
15:20-15:50
E-beam Metrology in Semiconductor Development
 
OhJang Kwon, SK hynix
 
 
15:50-16:20
OPC Accuracy Enabled by Fast eBeam System, Accurate Contour Metrology and Deep Learning
 
 
 
16:20-16:40
Break
 
 
16:40-17:10
 
 
 
17:10-17:40
 
 
 
17:40-18:10
 
 
 
18:10-19:00
Networking Reception
 
(Forum attendees are invited to networking reception.)
 
 

*The agenda will be subject to change without notice.

 

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