Jaejin, Shin has been an engineer at Samsung Electronics for 12 years with responsibility of Cleaning process development. Mr. Shin developed Cleaning process technology for sub 2x nm planar and over 4x layers vertical NAND, a variety of wet/dry Cleaning technologies, including FLASH process integration.
Mr. Shin received the Masters’ degree in Chemical Engineering from the Sogang University, Seoul, South Korea.
You can hear his presentiation at S5. Contamination-free Manufacturing and CMP Technology(STS)