Plasma & Etching Tutorial

Room 307, COEX Thursday, February 01
9:00am to 11:45am

This short course tutorial is designed as basic course for new engineers who is working at etching technology related area. With the practical lecture from device makers, equipment suppliers and academia, you will learn the hottest issues and challenges in plasma & etching process and fundamental technologies as well.


  • Date: Feb 1(Thu), 2018
  • Time: 09:00-11:45
  • Room: #307, Conference Room (South), COEX
  • Language: Korean (Simultaneous interpretation will NOT be provided)



  09:45-10:00 Break
 10:45-11:00 Break
Research Trend of Atomic Layer Etching
*The agenda will be subject to change without notice.
*Proceeding will be provided at onsite.
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