High Brightness FIB : Fundamentals & Application

Room 301, COEX Friday, February 02
1:30pm to 4:30pm


  • Date: Feb 2(Fri), 2018
  • Time: 13:30-16:30
  • Room: #301, Conference Room (South), COEX
  • Language: English & Korean (Simultaneous interpretation will NOT be provided)
  • Organized by KAIST, SL Innovation
  • Supported by SEMI


Keynote Speakers

Principle of High Brightness Plasma Beam for FIB System
Application of Next Generation FIB System in Microelectronics Application
Prof. Ko DH, Yonsei University
Next Generation Focused Ion Beam Using High Density Plasma Beam
Prof. Chang HY, KAIST



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