MI(Metrology and Inspection) Forum
:What do we need Metrology & Inspection Technology for Future Semiconductor Process

Date: Thursday, January 27, 2011

Time: 10:00-15:50

Room: #318, Conference center, 3rd Fl,. COEX

Language: English

Simultaneous interpretation will NOT be provided.

 

Registration Fee 

SEMI Member

Non-Member

By     Jan. 14

50,000 won

70,000 won

After  Jan. 14

70,000 won

100,000 won

 

Now that timing is critical to a semiconductor business, we need to monitor process status during processing. In order to do those normally we use Metrology and Inspection techniques. Although Metrology and Inspection are critical parts of semiconductor manufacturing process. its value has been underestimated. Definitely, it substantially contributes to improvement of the quality and efficiency of manufacturing process and yield. It is time to know those. Therefore, it is aimed that MI Forum at SEMICON Korea 2011 should be a leverage to assess its value in manufacturing process as well as to further develop its infrastructure within the industry for future semiconductor technology


Sponsored by KLA-Tencor, Nanometrics

Agenda 

Session 1: EUV

10:00-10:30

MI Solution for EUV Mask 

Dr. Erez Paran, Applied Materials

10:30-11:00 

EUV: What Kinds of Problem is there for MI Perspective?         

Dr. Dongchul Ihm, Samsung Electronics

 

Session 2: 450mm & TSV

11:00-11:30

MI Preparation for 450mm Wafer Production Prospect    

Dr. Scott Balak, Rudolph 

11:30-12:00

Measurement and Inspection of High Aspect Features of TSV          

Dr. Michael Darwin, Nanometrics 

12:00-13:30

Lunch

Session 3: Sub 20nm Design Rule

13:30-14:00

Wafer Inspection Challenges for Advanced Design Rule Devices    

Dr. Jorge Fernandez, KLA-Tencor 

14:00-14:30

Is It Enough to Measure Profile Using Current OCD Technology?           

Dr. Thomas Germer, NIST 

14:30-14:50

Break 

14:50-15:20

Metrology for Beyond the 22nm Node              

Mr. Ben Bunday, SEMATECH 

15:20-15:50

Rising Sun: Analysis                       

Mr. Jaehyun Kim, Hynix Semiconductor 

15:50

Adjourn

 

*The agenda will be subject to change without notice.